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P473 - Exit slit unit for soft X-ray synchrotron radiation LOREA Beamline at ALBA of CELLS, Spain - Bestec GmbH
P473 - Exit slit unit for soft X-ray synchrotron radiation LOREA Beamline at ALBA of CELLS, Spain - Bestec GmbH

P473 – Precision Slits LOREA ALBA CELLS

Application

Exit slit unit for soft X-ray synchrotron radiation

Year of delivery

2019

Installation site

LOREA beamline at ALBA of CELLS, Spain

Design Features

Performance Features

  • Precision and slit opening repeatability smaller than 10 nm.
  • Parallelism smaller than 1 µm over 10 mm edge length.
  • Straightness smaller than 0.15 µm over 10 mm edgle length.
  • Very small deviation (submicrometer) of the slit opening calibration curve from the theoretical non-linear slit opening function.

Outer Dimensions

P473 - Outer dimensions - Exit slit unit for soft X-ray synchrotron radiation LOREA Beamline at ALBA of CELLS, Spain - Bestec GmbH

Technical specifications and performance values

General

Vacuum chamber
(separate chambers
for HDS and VDS)

Chamber type

cylindrical, horizontal axis

Main flanges

DN160CF cluster flanges

Material

1.4301

Base pressure

10-10 mbar range

Translation along beam axis
(VDS chamber)

Range

± 200 mm

Resolution (design value)

0.025 µm /motor fine step
(1/32, recommended)
0.05 µm /encoder count

Resolution (measured value)

2 µm

Linearity

2.42 µm

Hysteresis

12 µm

Repeatability

0.90 µm

Parasitic roll
(rotation about beam axis)

20 µrad

Parasitic pitch

40 µrad

Vertical translation
(VDS chamber)

Range

5 mm

Resolution (design value)

0.025 µm /motor fine step
(1/16, recommended)
0.003 µm /motor step
(at wedge leveler)
0.05 µm /encoder count

Resolution (measured value)

2 µm

Linearity

1.58 µm

Hysteresis

4 µm

Repeatability

0.50 µm

Parasitic roll
(rotation about beam axis)

20 µrad

Parasitic pitch

90 µrad

Horizontally defining slit (HDS)

Slit blades

Material

OFHC

Straightness

< 0.10 µm over 10 mm (1σ)

Parallelism

-0.07 µm /mm
(20 µm slit opening)
-0.06 µm /mm
(50 µm slit opening)
-0.09 µm /mm
(100 µm slit opening)

Slit opening

Range

4.5 µm to 7 mm

Repeatability

± 0.006 µm at 10 µm slit opening
± 0.009 µm at 45 µm slit opening
± 0.020 µm at 100 µm slit opening

Long-term stability (> 2 h)

0.012 µm

Resolution (design value)

0.006 µm /motor fine step
(1/16, recommended)
0.05 µm /encoder count

Slit translation

Range

-5.23 µm to 5.11 mm

Linearity

0.16 µm

Hysteresis

0.90 µm

Long-term stability (> 8 h)

0.20 µm

Resolution (design value)

0.006 µm /motor fine step
(1/16, recommended)
0.05 µm /encoder count

Vertically defining slit (VDS)

Slit blades

Material

OFHC

Straightness

< 0.15 µm over 10 mm (1σ)

Parallelism

-0.04 µm /mm
(20 µm slit opening)
-0.06 µm /mm
(50 µm slit opening)
-0.06 µm /mm
(100 µm slit opening)

Slit opening

Range

2 µm to 7 mm

Repeatability

± 0.009 µm at 10 µm slit opening
± 0.003 µm at 45 µm slit opening
± 0.003 µm at 100 µm slit opening

Long-term stability (> 2 h)

0.006 µm

Resolution (design value)

0.006 µm /motor fine step
(1/16, recommended)
0.05 µm /count

Slit rotation

Range

-0.5 µm to 0.5 mm

Actuator

manual rotary feedthrough

Resolution (design value)

0.153° /turn

Performance Test Results

Slit unit horizontal translation linearity
P473 - Slit unit translation (XSTH) linearity - Exit slit unit for soft X-ray synchrotron radiation LOREA Beamline at ALBA of CELLS, Spain - Bestec GmbH
Slit unit horizontal translation hysteresis
P473 - Slit unit translation (XSTH) hysteresis - Exit slit unit for soft X-ray synchrotron radiation LOREA Beamline at ALBA of CELLS, Spain - Bestec GmbH
Slit unit horizontal translation
repeatability
P473 - Slit unit translation (XSTH) repeatability - Exit slit unit for soft X-ray synchrotron radiation LOREA Beamline at ALBA of CELLS, Spain - Bestec GmbH
Slit unit horizontal translation
positioning resolution
P473 - Slit unit translation (XSTH) resolution - Exit slit unit for soft X-ray synchrotron radiation LOREA Beamline at ALBA of CELLS, Spain - Bestec GmbH
Slit unit vertical translation linearity
P473 - Slit unit translation (XSTV) linearity - Exit slit unit for soft X-ray synchrotron radiation LOREA Beamline at ALBA of CELLS, Spain - Bestec GmbH
Slit unit translation (XSTV) hysteresis
P473 - Slit unit translation (XSTV) hysteresis - Exit slit unit for soft X-ray synchrotron radiation LOREA Beamline at ALBA of CELLS, Spain - Bestec GmbH
Slit unit vertical translation
repeatability
P473 - Slit unit translation (XSTV) repeatability - Exit slit unit for soft X-ray synchrotron radiation LOREA Beamline at ALBA of CELLS, Spain - Bestec GmbH
Slit unit vertical translation
positioning resolution
P473 - Slit unit translation (XSTV) resolution - Exit slit unit for soft X-ray synchrotron radiation LOREA Beamline at ALBA of CELLS, Spain - Bestec GmbH
Slit opening calibration (HDS)
P473 - Slit width calibration (HDS) - Exit slit unit for soft X-ray synchrotron radiation LOREA Beamline at ALBA of CELLS, Spain - Bestec GmbH
Slit opening repeatability (HDS)
P473 - Slit opening repeatability_20 (HDS) - Exit slit unit for soft X-ray synchrotron radiation LOREA Beamline at ALBA of CELLS, Spain - Bestec GmbH
Slit opening repeatability (HDS)
P473 - Slit opening repeatability_50 (HDS) - Exit slit unit for soft X-ray synchrotron radiation LOREA Beamline at ALBA of CELLS, Spain - Bestec GmbH
Slit opening repeatability (HDS)
P473 - Slit opening repeatability_100 (HDS) - Exit slit unit for soft X-ray synchrotron radiation LOREA Beamline at ALBA of CELLS, Spain - Bestec GmbH
Slit opening repeatability (HDS)
P473 - Slit opening repeatability (HDS) - Exit slit unit for soft X-ray synchrotron radiation LOREA Beamline at ALBA of CELLS, Spain - Bestec GmbH
Slit blades parallelism (HDS)
P473 - Slit blades parallelism (HDS) - Exit slit unit for soft X-ray synchrotron radiation LOREA Beamline at ALBA of CELLS, Spain - Bestec GmbH
Slit blades parallelism (HDS)
P473 - Slit blades parallelism (HDS) - Exit slit unit for soft X-ray synchrotron radiation LOREA Beamline at ALBA of CELLS, Spain - Bestec GmbH
Slit blades parallelism (HDS)
P473 - Slit blades parallelism (HDS) - Exit slit unit for soft X-ray synchrotron radiation LOREA Beamline at ALBA of CELLS, Spain - Bestec GmbH
Slit opening long-term stability (HDS)
P473 - Slit opening stability (HDS) - Exit slit unit for soft X-ray synchrotron radiation LOREA Beamline at ALBA of CELLS, Spain - Bestec GmbH
Slit translation linearity (HDS)
P473 - Slit translation linearity (HDS) - Exit slit unit for soft X-ray synchrotron radiation LOREA Beamline at ALBA of CELLS, Spain - Bestec GmbH
Slit translation hysteresis (HDS)
P473 - Slit translation hysteresis (HDS) - Exit slit unit for soft X-ray synchrotron radiation LOREA Beamline at ALBA of CELLS, Spain - Bestec GmbH
Slit translation stability (HDS)
P473 - Slit translation stability (HDS) - Exit slit unit for soft X-ray synchrotron radiation LOREA Beamline at ALBA of CELLS, Spain - Bestec GmbH
Slit opening calibration (VDS)
P473 - Slit width calibration (VDS) - Exit slit unit for soft X-ray synchrotron radiation LOREA Beamline at ALBA of CELLS, Spain - Bestec GmbH
Slit opening repeatability (VDS)
P473 - Slit opening repeatability 20 (VDS) - Exit slit unit for soft X-ray synchrotron radiation LOREA Beamline at ALBA of CELLS, Spain - Bestec GmbH
Slit opening repeatability (VDS)
P473 - Slit opening repeatability 50 (VDS) - Exit slit unit for soft X-ray synchrotron radiation LOREA Beamline at ALBA of CELLS, Spain - Bestec GmbH
Slit opening repeatability (VDS)
P473 - Slit opening repeatability 100 (VDS) - Exit slit unit for soft X-ray synchrotron radiation LOREA Beamline at ALBA of CELLS, Spain - Bestec GmbH
Slit opening repeatability (VDS)
P473 - Slit opening repeatability (VDS) - Exit slit unit for soft X-ray synchrotron radiation LOREA Beamline at ALBA of CELLS, Spain - Bestec GmbH
Slit blades parallelism (VDS)
P473 - Slit blades parallelism (VDS) - Exit slit unit for soft X-ray synchrotron radiation LOREA Beamline at ALBA of CELLS, Spain - Bestec GmbH
Slit blades parallelism (VDS)
P473 - Slit blades parallelism (VDS) - Exit slit unit for soft X-ray synchrotron radiation LOREA Beamline at ALBA of CELLS, Spain - Bestec GmbH
Slit blades parallelism (VDS)
P473 - Slit blades parallelism (VDS) - Exit slit unit for soft X-ray synchrotron radiation LOREA Beamline at ALBA of CELLS, Spain - Bestec GmbH
Slit opening long-term stability (VDS)
P473 - Slit opening stability (VDS) - Exit slit unit for soft X-ray synchrotron radiation LOREA Beamline at ALBA of CELLS, Spain - Bestec GmbH
Residual gas analysis
P473 - Residual gas analysis - Exit slit unit for soft X-ray synchrotron radiation LOREA Beamline at ALBA of CELLS, Spain - Bestec GmbH