P424 – Exit Slit Unit SIX NSLS-II
Application
Exit slit unit for soft X-ray synchrotron radiation
Year of delivery
2015
Installation site
SIX beamline at synchrotron radiation source NSLS-II, USA
Design Features
-
Double slit mechanism – vertically and one horizontally defining slits.
- Motorized and encoded slits opening, symmetric opening, non-linear opening characteristics.
- OFHC slit blades.
- Electrical isolation of all slit blades.
-
Motorized and encoded translation of horizontally defining slit transversal to the beam axis.
- Bias plate with adjustable YAG screen.
- Adjustable support structure.
Performance Features
- Precision and slit opening repeatability smaller than 150 nm.
- Parallelism smaller than 0.7 µm over 10 mm edge length.
- Straightness smaller than 0.5 µm over 10 mm edgle length.
- Very small deviation (submicrometer) of the slit opening calibration curve from the theoretical non-linear slit opening function.
Outer Dimensions
Technical specifications and performance values
General
Vacuum chamber
Chamber type
cylindrical, horizontal axis
Main flanges
DN160CF cluster flanges
Material
1.4301
Base pressure
10-10 mbar range
Support structure
adjustment ranges
Height
± 15 mm
Lateral translation
± 15 mm
Longitudinal
± 15 mm
Pitch
± 2°
Roll
± 2°
Yaw
± 2°
Horizontally defining slit (HDS)
Slit blades
Material
OFHC
Straightness
< 0.35 µm over 10 mm (1σ)
Parallelism
-0.004 µm /mm
(10 µm slit opening)
-0.015 µm /mm
(25 µm slit opening)
-0.011 µm /mm
(50 µm slit opening)
Slit opening
Range
5 µm to 9.5 mm
Repeatability
± 0.15 µm
(up to 340 µm slit opening)
Resolution (design value)
0.006 µm /fine motor step
(1/16, recommended)
0.05 µm /encoder count
Slit translation
Range
-6.7 mm to +2.8 mm
Resolution (design value)
0.006 µm /motor fine step
(1/16, recommended)
0.05 µm /encoder count
Vertically defining slit (VDS)
Slit blades
Material
OFHC
Straightness
< 0.10 µm over 20 mm (1σ)
Parallelism
-0.06 µm /mm
(10 µm slit opening)
-0.05 µm /mm
(25 µm slit opening)
-0.04 µm /mm
(50 µm slit opening)
Slit opening
Range
2.7 µm to 18 mm
Repeatability
± 0.04 µm
(up to 420 µm slit opening)
Resolution (design value)
0.006 µm /motor fine step
(1/16, recommended)
0.05 µm /encoder count
Performance Test Results
Slit width calibration (HDS)
Slit opening repeatability (HDS)
Slit blades parallelism (HDS)
Slit blades parallelism (HDS)
Slit blades parallelism (HDS)
Slit width calibration (VDS)
Slit opening repeatability (VDS)
Slit blades parallelism (VDS)
Slit blades parallelism (VDS)
Slit blades parallelism (VDS)
Residual gas analysis
