P406 – Mirror Unit CAT_soft EMIL BESSY
Application
Mirror unit (M3) for soft X-ray synchrotron radiation
Year of delivery
2015
Installation site
EMIL soft X-ray beamline at BESSY, Helmholtz-Zentrum Berlin, Germany
This soft X-ray deflection mirror unit is part of the combined hard and soft X-ray EMIL beamlines at BESSY. It features an optimized design of the constant-strut-length hexapod mechanism used for the first Bestec hexapod (see project P377). The vacuum chamber accomodates not only the actual beam but also the passing soft and hard X-ray beams of the neighbouring branches.
Design Features
-
Constant-strut-length hexapod mechanism.
- Six degrees of freedom and selectable rotation center.
- Spectral range: 80 – 2000 eV
- Optical elements: one focusing mirror.
- Electrode at mirror surface for carbon contamination prevention.
-
Provisions for RF oxygen plasma cleaning of the optical surface.
- Four motorized OFHC aperture blades at the entrance flange.
- Permanently installed bakeout provisions.
- Adjustable support structure.
Performance Features
- High positioning resolution (minimum incremental motion).
- High stability and repeatability for all degrees of freedom.
- Minimized mounting induced deformations.
Outer Dimensions
Technical specifications and performance values
General
Vacuum chamber
Chamber type
cylindrical, vertical axis
Main flanges
at the top
Material
1.4404 (C < 0.02%)
Base pressure
10-10 mbar range
Optical design parameters
Beam height
1420 mm
Number of mirrors
1
Surface shape
cylindrical
Mirror dimensions
220 x 40(25) x 40(8) mm3
(T-Profile)
Actuator drives for hexapod axes
Resolution (design value)
0.004 µm /motor fine step
(1/128, recommended)
0.005 µm /encoder count
Mirror mechanics
Pitch rotation
Range
± 8 mrad
Resolution (measured value)
0.05 µrad
Repeatability
0.06 µrad (pitch)
0.04 µrad (roll)
Long-term stability (> 1h)
0.05 µrad
Roll rotation
Range
± 10 mrad
Resolution
0.05 µrad
Repeatability
0.06 µrad (pitch)
0.05 µrad (roll)
Yaw rotation
Range
± 8 mrad
Resolution
0.05 µrad
Vertical translation
Range
± 5 mm
Horizontal translation
Range
± 5 mm
Aperture unit
Blades
Material
OFHC
Stroke
25 mm, 50 mm
Resolution (design value)
10 µm /motor step
(full step at actuator)
0.11 µm /motor fine step at blade
(1/64, recommended)
Performance Test Results
Pitch deviation after pitch change
Roll deviation after pitch change
Pitch deviation after roll change
Roll deviation after roll change
Mirror pitch positioning resolution
Mirror pitch long-term stability
