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P359 - Exit slit unit for soft X-ray synchrotron radiation at Beamline I09 at Diamond Light Source, Didcot, United Kingdom - Bestec GmbH
P359 - Exit slit unit for soft X-ray synchrotron radiation at Beamline I09 at Diamond Light Source, Didcot, United Kingdom - Bestec GmbH

P359 – Exit Slit Unit I09 DLS

Application

Exit slit unit for soft X-ray synchrotron radiation

Year of delivery

2012

Installation site

Beamline I09 at Diamond Light Source, Didcot, United Kingdom

Design Features

Performance Features

  • Precision and slit opening repeatability smaller than 100 nm.
  • Parallelism smaller than 0.6 µm over 10 mm edge length.
  • Straightness smaller than 0.5 µm over 10 mm edgle length.
  • Very small deviation (submicrometer) of the slit opening calibration curve from the theoretical non-linear slit opening function.

Outer Dimensions

P359 - Outer dimensions - Exit slit unit for soft X-ray synchrotron radiation at Beamline I09 at Diamond Light Source, Didcot, United Kingdom - Bestec GmbH

Technical specifications and performance values

General

Vacuum chamber

Chamber type

cylindrical, horizontal axis

Main flanges

DN160CF cluster flanges

Material

1.4301

Base pressure

10-10 mbar range

Translation along beam axis

Range

± 100 mm

Resolution (design value)

0.015 mm /motor fine step
(1/64, recommended)
0.05 µm /encoder count

Horizontally defining slit (HDS)

Slit blades

Material

Tungsten

Straightness

< 1 µm over 10 mm (1σ)

Parallelism

-0.03 µm /mm
(10 µm slit opening)
0.02 µm /mm
(25 µm slit opening)
0.04 µm /mm
(50 µm slit opening)

Slit opening

Range

0 µm to 10 mm

Repeatability

± 0.03 µm
(up to 300 µm slit opening)

Resolution (design value)

0.006 mm /motor fine step
(1/16, recommended)
0.05 µm /encoder count

Vertically defining slit (VDS)

Slit blades

Material

Tungsten

Straightness

< 0.70 µm over 10 mm (1σ)

Parallelism

0.038 µm /mm
(10 µm slit opening)
-0.04 µm /mm
(25 µm slit opening)
0.006 µm /mm
(50 µm slit opening)

Slit opening

Range

0 µm to 10mm

Repeatability

± 0.04 µm
(up to 320 µm slit opening)

Resolution (design value)

0.006 mm /motor fine step
(1/16, recommended)
0.05 µm /encoder count

Performance Test Results

Slit width calibration (HDS)
P359 - Slit width calibration (HDS) - Exit slit unit for soft X-ray synchrotron radiation at Beamline I09 at Diamond Light Source, Didcot, United Kingdom - Bestec GmbH
Slit opening repeatability (HDS)
P359 - Slit opening repeatability (HDS) - Exit slit unit for soft X-ray synchrotron radiation at Beamline I09 at Diamond Light Source, Didcot, United Kingdom - Bestec GmbH
Slit blades parallelism (HDS)
P359 - Slit blades parallelism (HDS) - Exit slit unit for soft X-ray synchrotron radiation at Beamline I09 at Diamond Light Source, Didcot, United Kingdom - Bestec GmbH
Slit blades parallelism (HDS)
P359 - Slit blades parallelism (HDS) - Exit slit unit for soft X-ray synchrotron radiation at Beamline I09 at Diamond Light Source, Didcot, United Kingdom - Bestec GmbH
Slit blades parallelism (HDS)
P359 - Slit blades parallelism (HDS) - Exit slit unit for soft X-ray synchrotron radiation at Beamline I09 at Diamond Light Source, Didcot, United Kingdom - Bestec GmbH
Slit width calibration (VDS)
P359 - Slit width calibration (VDS) - Exit slit unit for soft X-ray synchrotron radiation at Beamline I09 at Diamond Light Source, Didcot, United Kingdom - Bestec GmbH
Slit opening repeatability (VDS)
P359 - Slit opening repeatability (VDS) - Exit slit unit for soft X-ray synchrotron radiation at Beamline I09 at Diamond Light Source, Didcot, United Kingdom - Bestec GmbH
Slit blades parallelism (VDS)
P359 - Slit blades parallelism (VDS) - Exit slit unit for soft X-ray synchrotron radiation at Beamline I09 at Diamond Light Source, Didcot, United Kingdom - Bestec GmbH
Slit blades parallelism (VDS)
P359 - Slit blades parallelism (VDS) - Exit slit unit for soft X-ray synchrotron radiation at Beamline I09 at Diamond Light Source, Didcot, United Kingdom - Bestec GmbH
Slit blades parallelism (VDS)
P359 - Slit blades parallelism (VDS) - Exit slit unit for soft X-ray synchrotron radiation at Beamline I09 at Diamond Light Source, Didcot, United Kingdom - Bestec GmbH
Residual gas analysis
P359 - Residual gas analysis - Exit slit unit for soft X-ray synchrotron radiation at Beamline I09 at Diamond Light Source, Didcot, United Kingdom - Bestec GmbH